Chemical Vapor Deposition Systems

South Dakota’s $20 million, five-year NSF EPSCoR Track-1 grant supports the acquisition of equipment for research and discovery-based learning activities. One of the amazing tools implemented through this grant is the FirstNano – Chemical Vapor Deposition Systems.

Features:

• Hexagonal Boron Nitride – hBN CVD
  • Thermal CVD, Specimen sizes- up to 100 mm
  • 3 Zone Resistance Furnace (up to 1100 °C)
  • Low Pressure Operation (100 – 700 torr),
• Graphene – GR CVD
  • Plasma Enhanced CVD, Specimens-up to 100 mm
  • RF Plasma 600 Watt, 13.56 MHz
  • Low Pressure (200 – 500 mTorr)
• Training and Samples: Hands-on training is available for interested users.

Training & Samples:

Hands-on training available on long-term basis (6-10 months) for interested users due to complex nature of PLD operation. However, samples can be provided on short term basis (2 weeks).

Left to right: Senator Thune and Drs.
Talluri and Gadhamshetty discussing chemical vapor deposition (CVD) research

WEB Description:

View more information of the FirstNano – Chemical Vapor Deposition Systems here: EasyTube® 3000 | FirstNano®.

Location & COST:

• Location: South Dakota Mines, 2D Materials Laboratory (2DML), Ascent building, Room 116
• Cost: Use Fees

Interested? Contact:

• Dr. Suvarna Talluri (Suvarna.Talluri@sdsmt.edu)
• PI: Dr. Ramana Gadhamshetty