SD EPSCoR News

Plasma Enhanced CVD Facility

Posted on: September 4, 2024   |   Category: Research Facilities
Flash Thermos

South Dakota’s $20 million, five-year NSF EPSCoR Track-1 grant supports the acquisition of equipment for research and discovery-based learning activities. One of the amazing tools implemented through this grant is the CVD Systems – planarTECH.

Features:

  • Three MFCs (CH4, H2 & Ar)
  • Single Zone KW Furnace (Max. 1,100°C)
  • Auto Pressure Control w/ Motorized Throttle Valve
  • 10Torr CM & Semi Automated Touchscreen Operator Interface

Training & Samples:

By Appointment

Cvd





PlanarGrow 2B –
thermal chemical vapor deposition system


WEB Description:

View more information of the here: CVD Systems – planarTECH

Location & COST:

  • Location: South Dakota State University
  • Cost: Use Fees

Interested? Contact: